Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization

doi:10.1109/JMEMS.2018.2828423

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	Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization
	Zheng, Zhou 1; Na, Shuai 1; Chen, Albert I. -Hsiang 1; Li, Zhenhao 1; Wong, Lawrence L. P.1; Sun, Zhendong2 ; Yao, Yao 3; Liu, Ping 4; Yeow, John T. W.1
	2018-06-01
发表期刊	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN	1057-7157
卷号	27 期号:3 页码:538-546
摘要	Capacitive micromachined ultrasonic transducers (CMUTs) have shown great potential to make a strong impact on ultrasound imaging technologies over the years. However, a critical weakness of CMUTs is their relatively low output pressure at transmission. To address this, we present a novel dualelement ultrasonic transducer that incorporates two transducer technologies by using a circular commercial piezoelectric element for ultrasound transmission and an annular CMUT element for reception. The hybrid transducer combines the broad bandwidth and high receive sensitivity of the CMUT and the high output pressure of the piezoelectric transducer to improve the overall sensitivity and axial resolution. The annular CMUT is designed, fabricated, and concentrically aligned with the piezoelectric probe via a custom housing. A through-wafer etching scheme based on deep reactive-ion etching is developed to create the CMUT annulus. Immersion characterization reveals that the CMUT has a center frequency of 2.63 MHz, a -6-dB fractional bandwidth of 131%, and a receive sensitivity of 22.57 mV/kPa, compared with 2.34 MHz, 42%, and 4.28 mV/kPa of the piezoelectric probe. The round-trip measurements show that the hybrid dual-element transducer improves the axial resolution by 25.58% and the signal-to-noise ratio by 8.55 dB over the commercial piezoelectric probe.
关键词	Annular element capacitive micromachined ultrasonic transducer (CMUT) concentric deep reactive-ion etching dual-element hybrid transducer
DOI	10.1109/JMEMS.2018.2828423
语种	英语
资助项目	Natural Sciences and Engineering Research Council of Canada ; Canada Research Chairs Program ; CMC Microsystems ; China Scholarship Council
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000433954100022
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
引用统计
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/30539
专题	系统科学研究所
通讯作者	Yeow, John T. W.
作者单位	1.Univ Waterloo, Adv Micronanodevices Lab, Waterloo, ON N2L 3G1, Canada 2.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing 100190, Peoples R China 3.Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China 4.Dongguan Univ Technol, Dept Elect Engn & Intelligentizat, Dongguan 523808, Peoples R China
推荐引用方式 GB/T 7714	Zheng, Zhou,Na, Shuai,Chen, Albert I. -Hsiang,et al. Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2018,27(3):538-546.
APA	Zheng, Zhou.,Na, Shuai.,Chen, Albert I. -Hsiang.,Li, Zhenhao.,Wong, Lawrence L. P..,...&Yeow, John T. W..(2018).Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,27(3),538-546.
MLA	Zheng, Zhou,et al."Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 27.3(2018):538-546.