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Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization
Zheng, Zhou1; Na, Shuai1; Chen, Albert I. -Hsiang1; Li, Zhenhao1; Wong, Lawrence L. P.1; Sun, Zhendong2; Yao, Yao3; Liu, Ping4; Yeow, John T. W.1
2018-06-01
Source PublicationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN1057-7157
Volume27Issue:3Pages:538-546
AbstractCapacitive micromachined ultrasonic transducers (CMUTs) have shown great potential to make a strong impact on ultrasound imaging technologies over the years. However, a critical weakness of CMUTs is their relatively low output pressure at transmission. To address this, we present a novel dualelement ultrasonic transducer that incorporates two transducer technologies by using a circular commercial piezoelectric element for ultrasound transmission and an annular CMUT element for reception. The hybrid transducer combines the broad bandwidth and high receive sensitivity of the CMUT and the high output pressure of the piezoelectric transducer to improve the overall sensitivity and axial resolution. The annular CMUT is designed, fabricated, and concentrically aligned with the piezoelectric probe via a custom housing. A through-wafer etching scheme based on deep reactive-ion etching is developed to create the CMUT annulus. Immersion characterization reveals that the CMUT has a center frequency of 2.63 MHz, a -6-dB fractional bandwidth of 131%, and a receive sensitivity of 22.57 mV/kPa, compared with 2.34 MHz, 42%, and 4.28 mV/kPa of the piezoelectric probe. The round-trip measurements show that the hybrid dual-element transducer improves the axial resolution by 25.58% and the signal-to-noise ratio by 8.55 dB over the commercial piezoelectric probe.
KeywordAnnular element capacitive micromachined ultrasonic transducer (CMUT) concentric deep reactive-ion etching dual-element hybrid transducer
DOI10.1109/JMEMS.2018.2828423
Language英语
Funding ProjectNatural Sciences and Engineering Research Council of Canada ; Canada Research Chairs Program ; CMC Microsystems ; China Scholarship Council
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000433954100022
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation statistics
Document Type期刊论文
Identifierhttp://ir.amss.ac.cn/handle/2S8OKBNM/30539
Collection系统科学研究所
Affiliation1.Univ Waterloo, Adv Micronanodevices Lab, Waterloo, ON N2L 3G1, Canada
2.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing 100190, Peoples R China
3.Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
4.Dongguan Univ Technol, Dept Elect Engn & Intelligentizat, Dongguan 523808, Peoples R China
Recommended Citation
GB/T 7714
Zheng, Zhou,Na, Shuai,Chen, Albert I. -Hsiang,et al. Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2018,27(3):538-546.
APA Zheng, Zhou.,Na, Shuai.,Chen, Albert I. -Hsiang.,Li, Zhenhao.,Wong, Lawrence L. P..,...&Yeow, John T. W..(2018).Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,27(3),538-546.
MLA Zheng, Zhou,et al."Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 27.3(2018):538-546.
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