Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

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	Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System
其他题名	twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem
	Chen Hui 1; Sun Zhendong 2; Sun Weijie 3; Yeow John Tze Wei 4
	2019
发表期刊	IEEE-CAA JOURNAL OF AUTOMATICA SINICA
ISSN	2329-9266
卷号	6 期号:4 页码:1060-1067
摘要	In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect.
其他摘要	In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect.
关键词	PULL-IN ADAPTIVE-CONTROL DESIGN STABILIZATION MIRRORS ORDER Electrostatic micromirror imaging microelectromechanical system (MEMS) twisting algorithm
收录类别	CSCD
语种	英语
资助项目	[National Natural Science Foundation of China] ; [Natural Science and Engineering Research Council of Canada] ; [Scientific Research Key Foundation of Higher Education Institutions of Henan Province]
CSCD记录号	CSCD:6534429
引用统计
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/55973
专题	中国科学院数学与系统科学研究院
作者单位	1.河南大学 2.中国科学院数学与系统科学研究院 3.辽宁省地震局 4.University Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada
推荐引用方式 GB/T 7714	Chen Hui,Sun Zhendong,Sun Weijie,et al. Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System[J]. IEEE-CAA JOURNAL OF AUTOMATICA SINICA,2019,6(4):1060-1067.
APA	Chen Hui,Sun Zhendong,Sun Weijie,&Yeow John Tze Wei.(2019).Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System.IEEE-CAA JOURNAL OF AUTOMATICA SINICA,6(4),1060-1067.
MLA	Chen Hui,et al."Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System".IEEE-CAA JOURNAL OF AUTOMATICA SINICA 6.4(2019):1060-1067.