On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System

doi:10.1109/ACCESS.2020.2987469

CSpace

	On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System
	Wei, Wei 1; Xia, Pengfei 2; Xue, Wenchao 3; Zuo, Min 4
	2020
发表期刊	IEEE ACCESS
ISSN	2169-3536
卷号	8 页码:74771-74781
摘要	Nanopositioning systems are very popular and playing an increasingly vital role in micro and nano-scale positioning industry due to their unique ability to achieve high-precision and high-speed operation. However, hysteresis, commonly existing in piezoelectric actuators, degrades the precision seriously. Uncertain dynamics and sensor noises also greatly affect the accuracy. To address those challenges, a variable bandwidth active disturbance rejection control (VBADRC) is proposed and realized on a nanopositioning stage. All undesired issues are estimated by a time-varying extended state observer (TESO), and cancelled out by a variable bandwidth controller. Convergence of the TESO, advantages of a TESO over a linear extended state observer (LESO), and the closed-loop stability of the VBADRC are proven theoretically. Improvements of the VBADRC versus the linear active disturbance rejection control (LADRC) are validated by simulations and experiments. Both numerical and experimental results demonstrate that the VBADRC is not only able to provide the same disturbance estimation ability as the LADRC, but also more powerful in noise attenuation and reference tracking.
关键词	Nanopositioning Hysteresis Bandwidth Robust control Uncertainty Estimation error Nanopositioning active disturbance rejection control time-varying extended state observer variable bandwidth control noise attenuation
DOI	10.1109/ACCESS.2020.2987469
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[61873005] ; National Natural Science Foundation of China[61403006] ; Key Program of Beijing Municipal Education Commission, China[KZ201810011012] ; Support Project of High-level Teachers in Beijing Municipal Universities in the Period of 13th Five-year Plan, China[CITTCD201704044]
WOS研究方向	Computer Science ; Engineering ; Telecommunications
WOS类目	Computer Science, Information Systems ; Engineering, Electrical & Electronic ; Telecommunications
WOS记录号	WOS:000530830800103
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
引用统计
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/51461
专题	中国科学院数学与系统科学研究院
通讯作者	Zuo, Min
作者单位	1.Beijing Technol & Business Univ, Sch Comp & Informat Engn, Beijing 100048, Peoples R China 2.Beijing Technol & Business Univ, Natl Engn Lab Agriprod Qual Traceabil, Beijing 100048, Peoples R China 3.Chinese Acad Sci, Acad Math & Syst Sci, Beijing 100049, Peoples R China 4.Beijing Technol & Business Univ, Beijing Key Lab Big Data Technol Food Safety, Beijing 100048, Peoples R China
推荐引用方式 GB/T 7714	Wei, Wei,Xia, Pengfei,Xue, Wenchao,et al. On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System[J]. IEEE ACCESS,2020,8:74771-74781.
APA	Wei, Wei,Xia, Pengfei,Xue, Wenchao,&Zuo, Min.(2020).On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System.IEEE ACCESS,8,74771-74781.
MLA	Wei, Wei,et al."On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System".IEEE ACCESS 8(2020):74771-74781.