KMS Of Academy of mathematics and systems sciences, CAS
Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films | |
Wang Zhao-Liang; Tang Da-Wei; Jia Tao; Mao An-Min | |
2007-02-01 | |
发表期刊 | ACTA PHYSICA SINICA
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ISSN | 1000-3290 |
卷号 | 56期号:2页码:747-754 |
摘要 | Analytical solution in terms of series for temperature oscillation in the heater/thermometer film is derived for 3 omega measurements. The complex temperature solution is seperated into the real and imaginary parts. Analysis is performed to show the effect of the combined parameters of ac frequency, heater width and sample thermal properties on the temperature oscillation. The mathematical model for the measurement is corrected based on the solution. Accordingly, a 3 omega setup is developed to determine thermal conductivity of 500 nm-thick thin film on Si substrate. Uncertainty analysis and comparison with the results of differential-3 omega methods and published values are made, the results show good mutual agreement. The thermal conductivities of SiO2 film and Si substrate are determined simultaneously with the series solution and by extension to high frequency. The method is also employed to measure the thermal conductivity of the multi-layer antireflective coating of ZrO2 /SiO2 deposited on Nd:YAG surface. The ZrO2 film has a thermal conductivity smaller than the volume value. The established 3 omega setup and analytical method can be applied to investigate the thermal performance of thin film-substrate structures for use with micro-systems such MEMS. |
关键词 | 3 omega method micro/nano film thermal conductivity microscale heating film |
语种 | 英语 |
WOS研究方向 | Physics |
WOS类目 | Physics, Multidisciplinary |
WOS记录号 | WOS:000243986600023 |
出版者 | CHINESE PHYSICAL SOC |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.amss.ac.cn/handle/2S8OKBNM/4382 |
专题 | 中国科学院数学与系统科学研究院 |
通讯作者 | Tang Da-Wei |
作者单位 | 1.Chinese Acad Sci, Inst Engn Thermophys, Beijing 100080, Peoples R China 2.Chinese Acad Sci, Acad Math & Syst Sci, Beijing 100080, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Wang Zhao-Liang,Tang Da-Wei,Jia Tao,et al. Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films[J]. ACTA PHYSICA SINICA,2007,56(2):747-754. |
APA | Wang Zhao-Liang,Tang Da-Wei,Jia Tao,&Mao An-Min.(2007).Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films.ACTA PHYSICA SINICA,56(2),747-754. |
MLA | Wang Zhao-Liang,et al."Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films".ACTA PHYSICA SINICA 56.2(2007):747-754. |
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