twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem

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	twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem
	Chen Hui 1; Sun Zhendong2 ; Sun Weijie 3; Yeow John Tze Wei 4
	2019
发表期刊	ieeecaajournalofautomaticasinica
ISSN	2329-9266
卷号	6 期号:4 页码:1060
摘要	In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect.
语种	英语
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/38364
专题	系统科学研究所
作者单位	1.河南大学 2.中国科学院数学与系统科学研究院 3.华南理工大学 4.滑铁卢大学
推荐引用方式 GB/T 7714	Chen Hui,Sun Zhendong,Sun Weijie,et al. twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem[J]. ieeecaajournalofautomaticasinica,2019,6(4):1060.
APA	Chen Hui,Sun Zhendong,Sun Weijie,&Yeow John Tze Wei.(2019).twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem.ieeecaajournalofautomaticasinica,6(4),1060.
MLA	Chen Hui,et al."twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem".ieeecaajournalofautomaticasinica 6.4(2019):1060.