Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

doi:10.1080/15599612.2015.1095956

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	Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system
	Chen, Hui 1,2; Chen, Albert 3; Sun, Wei Jie 1; Sun, Zhen Dong 4; Yeow, John T. W.3
	2016-01-02
发表期刊	INTERNATIONAL JOURNAL OF OPTOMECHATRONICS
ISSN	1559-9612
卷号	10 期号:1 页码:1-13
摘要	This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.
关键词	micromirror adaptive algorithm sidewall electrodes 2-D image SMC MEMS laser scanning microscope
DOI	10.1080/15599612.2015.1095956
语种	英语
资助项目	National Basic Research Program of China (973 program)[2014CB845302] ; National Natural Science Foundation (NNSF) of China[61374036] ; National Natural Science Foundation (NNSF) of China[61273121] ; Natural Science Foundation of Guangdong Province[2014A030313237] ; Natural Science Foundation of Guangdong Province[2015A030313200] ; Natural Science and Engineering Research Council of Canada
WOS研究方向	Engineering ; Optics
WOS类目	Engineering, Electrical & Electronic ; Engineering, Mechanical ; Optics
WOS记录号	WOS:000373737400001
出版者	TAYLOR & FRANCIS INC
引用统计
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/22457
专题	中国科学院数学与系统科学研究院
通讯作者	Yeow, John T. W.
作者单位	1.S China Univ Technol, Coll Automat Sci & Engn, Guangzhou 510641, Guangdong, Peoples R China 2.HeNan Univ, Sch Comp & Informat Engn, Kaifeng, Peoples R China 3.Univ Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada 4.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing, Peoples R China
推荐引用方式 GB/T 7714	Chen, Hui,Chen, Albert,Sun, Wei Jie,et al. Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2016,10(1):1-13.
APA	Chen, Hui,Chen, Albert,Sun, Wei Jie,Sun, Zhen Dong,&Yeow, John T. W..(2016).Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,10(1),1-13.
MLA	Chen, Hui,et al."Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 10.1(2016):1-13.