ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD

doi:10.3934/dcdsb.2011.15.401

	ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD
	Ji, Xia1 ; Cai, Wei 2
	2011-03-01
发表期刊	DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B
ISSN	1531-3492
卷号	15 期号:2 页码:401-415
摘要	In this paper, we apply a newly developed generalized discontinuous Galerkin (GDG) method for rigorous simulations of 2-D phase shift masks (PSM). The main advantage of the GDG method is its accurate treatment of jumps in solutions using the Dirac delta generalized functions as source terms of partial differential equations. The scattering problem of the PSM is cast with a total field/scattering field formulation while the GDG method is used to handle the inhomogeneous jump conditions between the total and scattering fields along the physical and perfectly matched layer (PML) interfaces. Numerical results demonstrate the high order accuracy of the GDG method and its capability of handling the non-periodic structures such as optical images near mask edges.
关键词	Generalized discontinuous Galerkin method (GDG) discontinuous Galerkin method (DG) phase shift masks (PSM) perfectly matched layer (PML)
DOI	10.3934/dcdsb.2011.15.401
语种	英语
WOS研究方向	Mathematics
WOS类目	Mathematics, Applied
WOS记录号	WOS:000285791100007
出版者	AMER INST MATHEMATICAL SCIENCES
引用统计
文献类型	期刊论文
条目标识符	http://ir.amss.ac.cn/handle/2S8OKBNM/11506
专题	计算数学与科学工程计算研究所
通讯作者	Ji, Xia
作者单位	1.Chinese Acad Sci, Inst Computat Math, LSEC, Beijing 100190, Peoples R China 2.Univ N Carolina, Dept Math & Stat, Charlotte, NC 28223 USA
推荐引用方式 GB/T 7714	Ji, Xia,Cai, Wei. ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD[J]. DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,2011,15(2):401-415.
APA	Ji, Xia,&Cai, Wei.(2011).ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD.DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,15(2),401-415.
MLA	Ji, Xia,et al."ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD".DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B 15.2(2011):401-415.