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ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD
Ji, Xia1; Cai, Wei2
2011-03-01
Source PublicationDISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B
ISSN1531-3492
Volume15Issue:2Pages:401-415
AbstractIn this paper, we apply a newly developed generalized discontinuous Galerkin (GDG) method for rigorous simulations of 2-D phase shift masks (PSM). The main advantage of the GDG method is its accurate treatment of jumps in solutions using the Dirac delta generalized functions as source terms of partial differential equations. The scattering problem of the PSM is cast with a total field/scattering field formulation while the GDG method is used to handle the inhomogeneous jump conditions between the total and scattering fields along the physical and perfectly matched layer (PML) interfaces. Numerical results demonstrate the high order accuracy of the GDG method and its capability of handling the non-periodic structures such as optical images near mask edges.
KeywordGeneralized discontinuous Galerkin method (GDG) discontinuous Galerkin method (DG) phase shift masks (PSM) perfectly matched layer (PML)
DOI10.3934/dcdsb.2011.15.401
Language英语
WOS Research AreaMathematics
WOS SubjectMathematics, Applied
WOS IDWOS:000285791100007
PublisherAMER INST MATHEMATICAL SCIENCES
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Document Type期刊论文
Identifierhttp://ir.amss.ac.cn/handle/2S8OKBNM/11506
Collection计算数学与科学工程计算研究所
Corresponding AuthorJi, Xia
Affiliation1.Chinese Acad Sci, Inst Computat Math, LSEC, Beijing 100190, Peoples R China
2.Univ N Carolina, Dept Math & Stat, Charlotte, NC 28223 USA
Recommended Citation
GB/T 7714
Ji, Xia,Cai, Wei. ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD[J]. DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,2011,15(2):401-415.
APA Ji, Xia,&Cai, Wei.(2011).ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD.DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,15(2),401-415.
MLA Ji, Xia,et al."ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD".DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B 15.2(2011):401-415.
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