中文版 | English

在结果中检索

CSpace

浏览/检索结果: 共2条，第1-2条 帮助

限定条件            
已选(0)清除 条数/页：   排序方式：
ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD 期刊论文
DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B, 2011, 卷号: 15, 期号: 2, 页码: 401-415
作者:  Ji, Xia;  Cai, Wei
收藏  |  浏览/下载：128/0  |  提交时间：2018/07/30
Generalized discontinuous Galerkin method (GDG)  discontinuous Galerkin method (DG)  phase shift masks (PSM)  perfectly matched layer (PML)  
Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method 期刊论文
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 卷号: 8, 期号: 3, 页码: 13
作者:  Zong, Ke;  Zeng, Xuan;  Ji, Xia;  Cai, Wei
收藏  |  浏览/下载：93/0  |  提交时间：2018/07/30
lithography simulation  phase-shifting mask  spectral method  eigen oscillations  discontinuous Galerkin method  Schwarz domain decomposition iteration