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Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 卷号: 281, 页码: 1-8
作者:  Li, Zhenhao;  Na, Shuai;  Chen, Albert I. H.;  Wong, Lawrence L. P.;  Sun, Zhendong;  Liu, Ping;  Yeow, John T. W.
收藏  |  浏览/下载：166/0  |  提交时间：2018/11/16
Capacitive micromachined ultrasonic transducer  Adhesive wafer bonding  Photosensitive benzocyclobutene  Resonator  
Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
作者:  Zheng, Zhou;  Na, Shuai;  Chen, Albert I. -Hsiang;  Li, Zhenhao;  Wong, Lawrence L. P.;  Sun, Zhendong;  Yao, Yao;  Liu, Ping;  Yeow, John T. W.
收藏  |  浏览/下载：159/0  |  提交时间：2018/07/30
Annular element  capacitive micromachined ultrasonic transducer (CMUT)  concentric  deep reactive-ion etching  dual-element  hybrid transducer