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ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD 期刊论文
DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B, 2011, 卷号: 15, 期号: 2, 页码: 401-415
Authors:  Ji, Xia;  Cai, Wei
Favorite  |  View/Download:6/0  |  Submit date:2018/07/30
Generalized discontinuous Galerkin method (GDG)  discontinuous Galerkin method (DG)  phase shift masks (PSM)  perfectly matched layer (PML)