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Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
Authors:  Zheng, Zhou;  Na, Shuai;  Chen, Albert I. -Hsiang;  Li, Zhenhao;  Wong, Lawrence L. P.;  Sun, Zhendong;  Yao, Yao;  Liu, Ping;  Yeow, John T. W.
Favorite  |  View/Download:11/0  |  Submit date:2018/07/30
Annular element  capacitive micromachined ultrasonic transducer (CMUT)  concentric  deep reactive-ion etching  dual-element  hybrid transducer